薄膜电池制造工艺流程介绍1课件.pptx

1、非晶硅太阳电池结构图（参考图）非晶硅太阳电池结构图（参考图）1EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打

2、胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明2EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3r

3、d LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗P

4、OUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART3EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒

5、MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明4EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITI

6、ON沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK

7、 GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART5EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压CO

8、OLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明6EDGE GRINDING磨边1st CLEANING一次清

9、洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查

10、PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART7EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH

11、芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图

12、片说明8EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁

13、WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART9EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELD

14、ING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅

15、太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明10EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PRO

16、TECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART11EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3

17、rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗

18、POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明12EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTI

19、ON BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART13EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOS

20、ITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDB

21、ACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明14EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION

22、 (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART15EDGE GRINDING磨边1st CLEANI

23、NG一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECT

24、ION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明16EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION

25、 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS F

26、LOW CHART17EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CL

27、EAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明18EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TEST

28、ING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非

29、晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART19EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试

30、EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明20EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd

31、LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗

32、2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART21EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING滚焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE

33、修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明22EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PR

34、EHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D

35、U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART23EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LA

36、MINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART图片说明图片说明24EDGE GRIN

37、DING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION

38、 BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART25EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING

39、ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图P

40、ROCESS FLOW CHART图片说明图片说明26EDGE GRINDING磨边1st CLEANING一次清洗1st LASER激光一PREHEATING预热炉DEPOSITION沉积COOLING冷却2nd LASER激光二PVD磁控溅射3rd LASER激光三CELL TESTING芯片测试SPOT WELDING点焊EDGING ABLATION 激光扫边CELL WASH芯片清洗LAYOUT敷设LAMINATION (Front)层压COOLING冷却TRIM EDGE修边JUNCTION BOX装接线盒MODULE TESTING组件测试EDGE PROTECTION打胶CELL芯芯 片片SURFACE CLEAN外观清洁WELD JUNCTION BOX焊接接线盒INSPECTION检查PACKING装箱M O D U L E组组 件件PECVDBACK GLASS WASH背板玻璃清洗2nd CLEANING二次清洗POUR SEAL灌封Anneal退火非晶硅太阳电池制造工艺流程图非晶硅太阳电池制造工艺流程图PROCESS FLOW CHART27THANK YOU!