1、1ppt课件特气系统控制特气系统控制 气柜气柜VMB/VMPPLC盘面盘面电磁阀电磁阀气动阀气动阀GAS CYLINDERSENSORS易燃易爆：易燃易爆：SIH4/H4/B2H6/ASH3/PH3无毒：无毒：AR/HE/CF4/N2O/C2F6/SF6/O2-HE有毒：有毒：CL2/HBR/NH3/NF3/SIH2CL2/BCL3设备设备LAM易燃易爆：易燃易爆：SIH4/H4/B2H6/ASH3/PH3有毒：有毒：CL2/HBR/NH3/NF3/SIH2CL2/BCL3无毒：无毒：AR/HE/CF4/N2O/C2F6/SF6/O2-HEAMEMTCPMAMS101MRCCVDAPWJDFU
2、REPSLIMP2ppt课件3ppt课件1.电电电磁阀SENSORS4ppt课件5ppt课件6ppt课件(二二)GAS FLOW SCHEMATIC-DUAL GSM WITH PURGE GAS MANIFOLD7ppt课件8ppt课件9ppt课件10ppt课件5.气柜操作流程图气柜操作流程图SCREENMENUSCREENINPUTPASSWORDOPERATION SCREENA PANELOrB PANELSELECT GO TOA or B PANELNOAUTO PURGE(PREPURGE)FINISHCHANGE NEWCYLINDERTHEN PRESSACK.BUTTONNOPOSTPURGEFINISHPROCESS(INSTALL ESV)YSEYSECONFIRMLOAD CELL(NEW or OLDOPENCYLINDERLOW DELIVERYPRESSURE&HIGHDELIVERYPRESSURE(DO YOU WANGT TOPROCESS ORSTANDBY?SELECTPROCESSorSTANDBYPROCESSPROCESSSTANDBYSTANDBY11ppt课件前吹扫：前吹扫：）放空（图一）放空（图一）开开）通）通关关开开）抽真空）抽真空开开图一图一12ppt课件13ppt课件14ppt课件15ppt课件
