1、ESD Best Practical SharingTITL QRA 2Index ESD History Definition of ESD Material Reduce ESD Damaged Methodology ESD Check list 313141718464752PageReminder that ESD is a serious problem in the entire electronics industry.提醒所有员工提醒所有员工“静电静电”对对IC材料的破坏是一个非常严重的问题材料的破坏是一个非常严重的问题,它是整个半它是整个半导体所面临的一项挑战导体所面临的一
2、项挑战.Why Do We Need ESD Training?为何需要此为何需要此ESD训练课程训练课程?q It is believed that 25%of all component failures are a result of ESD.相信有大约相信有大约25%的的IC材料是因静电材料是因静电(ESD)的影响而遭破坏的影响而遭破坏3q Electrical Over Stress(EOS)-The exposure of an item to a current or voltage beyond its maximum ratings.EOS-指一个指一个IC材料受到超过其所能
3、负荷的电压材料受到超过其所能负荷的电压,电流而遭受到破坏电流而遭受到破坏 的状态的状态Definitions定义定义q Electrostatic Discharge(ESD)-The transfer of electrostatic charge between bodies or surfaces at different electrostatic potential.ESD is a subset of EOS.ESD-即静电放电之意即静电放电之意.指不同电位的二个物体之间产生的电荷急骤流指不同电位的二个物体之间产生的电荷急骤流 动的现象动的现象.4Conductors vs Ins
4、ulators带静电的絶缘体带静电的絶缘体Charged Insulator带静电的导体带静电的导体Charged ConductorConductor evenly distributes charge over entire surface平均分布于整个表面平均分布于整个表面Opposite polarity charges can exist on the same insulator.不同极性的电荷会同时存在絶缘体上不同极性的电荷会同时存在絶缘体上Conductor completelydischarges when grounded.Insulatoars do not allow
5、charge to flow.Grounding an insulator neither removescharge or prevents surface charges.5IC+IC-+-ICIC-q Static electricity has been a curiosity for many hundreds of years.Historyq Today,special precautions are taken by industries where static sparks could cause an explosion,e.g.,flour mills,hospital
6、 operating rooms,etc.在今天在今天,静电所产生的破坏已引起工业界的注意静电所产生的破坏已引起工业界的注意.例如例如:面粉厂的面粉厂的 尘爆尘爆,院的手术过程院的手术过程,IC制造工业等制造工业等.q After the invention of gun powder by the Chinese,it was no longer a curiosity for anyone manufacturing that product.静电现象一直存在于人类历史中静电现象一直存在于人类历史中,以前则被认为是一种奇特的异象以前则被认为是一种奇特的异象6q Strange failur
7、es occurred,and the cause of the problem was not easily seen with the optical microscopes-failure analysis read:cause unknown.静电造成一些奇特而不易察觉的破坏静电造成一些奇特而不易察觉的破坏,F/A分析的结论往往是分析的结论往往是:原因原因 不明不明.q EOS/ESD is perhaps the most significant failure mechanism in the electronics industry today.EOS/ESD对半导体之元件的破坏
8、对半导体之元件的破坏,可能是当今半导体界最头痛可能是当今半导体界最头痛,也也 是最严重的一个问题是最严重的一个问题.History7Fundamentals of Static-Tribocharging 磨擦产生静电磨擦产生静电This situation occurs when one or both of the materials are insulators.但这种情况为发生在其中一种物质为但这种情况为发生在其中一种物质为 绝缘体绝缘体Whenever two dissimilar materials make contact and then are separated,a sta
9、tic charge is created.二种不同性质的物质碰在一起再分离也会产生静电二种不同性质的物质碰在一起再分离也会产生静电.8Triboelectric SeriesFactors to consider:Humidity:湿度湿度Speed of separation:分离速度分离速度Type of material:材料性质材料性质Contact area:接触面积接触面积Increasing PositiveAir:空气空气Human Hand:手手Rabbit Fur:兔毛兔毛Glass:玻璃玻璃Mica:human hair:头发头发Nylon:尼龙尼龙Wool:毛毛Sil
10、k:丝丝Aluminum:锡锡Paper:纸纸Cotton:棉棉Steel:铜铁铜铁 Wood:木头木头Amber:Hard Rubber:橡胶橡胶Nickel,Copper,Brass,SilverPolyester:聚醋棉聚醋棉PolyethylenePolypropylene:软软片片PVC(Vinyl)Increasing Negative9静电放电的模型静电放电的模型n Human-Body Model,HBM)人体放电模型人体放电模型n Machine Model,MM)机器放电模型机器放电模型n Charged Device Model,CDM)元件充电模型元件充电模型 模拟由个
11、人之手指尖端放电至元件的现像模拟由个人之手指尖端放电至元件的现像 Grounded Surface10HBM 波形波形 C=100 PF R=1.5 K n Standard资料来源资料来源:工研院电子所工研院电子所11n 自动组装之制造环境自动组装之制造环境ESD 模型模型电感电感I(A)Time(ns)MM12n CDM Event 的来源的来源CDM 测试机台测试机台 自动插件自动插件 IC的包装的包装(Tube)13Definition定义定义(1)1.Conductive material-ESD protective material having a surface resist
12、ivity less than 1 x E5 ohms/square or a volume resistivity less than 1 x10E4 ohm-cm.导体导体-ESD保护物质其表面电阻系数小于保护物质其表面电阻系数小于 1x10E5 欧姆欧姆/单位面积或容积电阻系数小于单位面积或容积电阻系数小于 1 x 10E4 欧姆欧姆-公分者公分者.142.Static dissipative material-A material having a surface resistivity of at least 1 x 10E5 ohms/square or 1 x 10E4 ohm-
13、cm volume resistivity,but less than 1 x 10E12 ohm/square surface resistivity or 1 x 10E11 ohm-cm volume resistivity.静电传导物质静电传导物质-表面电阻系数介于表面电阻系数介于1 x 10E5 与与1 x10E12 欧姆欧姆/单位面积单位面积,或容积电阻系数介于或容积电阻系数介于1 x 10E4 与与1 x10E11 欧姆欧姆-公分者公分者.Definition定义定义(2)153.Insulative material-A material having a surface re
14、sistivity of at least 1 x 10E12 ohms/square or 1 x 10E11 ohm-cm volume resistivity.绝缘物质绝缘物质-物质它的表面电阻系数大于物质它的表面电阻系数大于 1x10E12 欧欧 姆姆/单位面积或容积电阻系数大于单位面积或容积电阻系数大于 1x10E11 欧姆欧姆-公公 分者分者.Definition定义定义(3)16Insutatic Material-Material that minimizes the generation of static charge less than+/-200(TCP100V)vol
15、ts when rubbed against itself,or when separated from itself or other similar materials.抗静电物质抗静电物质-物质若经自己相互磨擦或相互分开或与物质若经自己相互磨擦或相互分开或与其它类似物质分开时不产生大于其它类似物质分开时不产生大于+/-200(TCP100V)伏伏特的静电压者特的静电压者.Definition定义定义(4)17Safety Area安全区域安全区域The operation where all leads are at common voltage potential.(Wires are
16、 bonded and tie bar is not separated such as sealing,molding,PMI and so on.)材料所有的脚都在等电位材料所有的脚都在等电位.(已接线已接线,且脚尚未分且脚尚未分离离.如过炉如过炉,压模压模,压模前检查等区域压模前检查等区域).18Equipment设备设备a)Electrostatic Voltmeters/fieldmeters:静电表静电表b)Digital OHM Meter:数位欧姆表数位欧姆表c)Air Ionizer:离子风扇离子风扇d)Wrist strap or Foot Strap(Optional):
17、静电手环或脚环静电手环或脚环e)Conductive Bag&Antistatic Magazine:导电袋及抗静电管导电袋及抗静电管f)Caution Label:提醒标签提醒标签g)Anti-Static Void Filler:抗静电泡垫抗静电泡垫h)Dissipative Table/Floor MAT(Optional):静电地毡或桌垫静电地毡或桌垫i)Esd protected work station:无静电工作桌无静电工作桌j)Caution Sign:提醒广告牌提醒广告牌k)ESD Protective Shoes Tester:静电鞋测试器静电鞋测试器19Digital O
18、HM Meter 数位欧姆表数位欧姆表Shall be capable of measuring a dc resistance of 0.1 ohm through 1 megohm+/-10%with an open circuit voltage greater than 1.5 V.三用电表或直流电阻表应可量测三用电表或直流电阻表应可量测 0.1 欧姆到欧姆到 1 M 欧姆欧姆 +/-10%范围的电阻范围的电阻,且开路电压应大且开路电压应大 于于1.5 V 以上以上.20Air Ionizer 离子风扇离子风扇(1)The devices at work station must be
19、 within 4 feet maximum are measured by vertical line from the face of the ionizers and around 45 degrees on each side of this line.switched on and properly directed across the work surface.工作时必须置于距离离子风扇工作时必须置于距离离子风扇4英尺圆弧内英尺圆弧内,两边各近似两边各近似45度度角范围内角范围内.且方向正对着工作区域且方向正对着工作区域 任何静电敏感的材料放于任何静电敏感的材料放于工作台之前工作
20、台之前,必须把离子风扇先打开必须把离子风扇先打开,而且中途不可关掉而且中途不可关掉.211.Ionizer Balance+/-35 V 余额电压余额电压 离子风扇的余额离子风扇的余额 =30 cm,5min.小于小于+/-35 V2.Ionizer charge decay time.来量测离子风扇的放电衰退程度来量测离子风扇的放电衰退程度./=10E5 to/=1 M ohm to =/450 M ohm 静电防护鞋回路静电防护鞋回路 1 M 欧姆到欧姆到 450 M 欧姆间欧姆间.36ESD Protective Smocks静电防护衣静电防护衣 1.ESD protective smo
21、cks./=+/-200 V(TCP:100V)静静 电电 防防 护护 衣静电压小于或等于衣静电压小于或等于 200伏特伏特(TCP:100V)2.The ESD protective smocks shall be buttoned(except for the collar)whenever the wearer is at an ESD protected workstation or in a designated ESD protected area.当穿者在静电防护工作站或静电保护区内时当穿者在静电防护工作站或静电保护区内时,静电防护静电防护 衣的钮扣衣的钮扣(衣领上的除外衣领上的
22、除外)或拉鍊需要扣好或拉鍊需要扣好,拉好拉好37ESD Ground静电接地静电接地(1)1.The ESD ground shall be the equipment ground or earth ground.Equipment ground is the electrical ground(green)wire at receptacles that have been tested When both equipment and earth grounds are used at the same ESD protective workstation they shall be bo
23、nded together at some point in the ground system.静电接地应使用设备接地或大地接地静电接地应使用设备接地或大地接地.设备接地是电源插设备接地是电源插 中的电气接地中的电气接地(绿绿)线它需经过测试线它需经过测试.当两种接地方式于同一当两种接地方式于同一 静电防护工作站均被采用时静电防护工作站均被采用时,在接地系统上它们必须被连在接地系统上它们必须被连 结在一起结在一起.382.Each ESD workstation shall be individually connected to the ESD ground.The grounding s
24、hould not be hooked in series.This is to avoid the additive result of resistive and resulting in increase of decay time,also to avoid the grounding disconnected simultaneously when any grounding wire become open.每个静电工作站必须个别的连结到静电接地每个静电工作站必须个别的连结到静电接地.当一个静电工当一个静电工作站上有很多静电工作面时则每一个静电工作面需个别的作站上有很多静电工作面时
25、则每一个静电工作面需个别的接到静电接地点接到静电接地点.接地线也不可串接接地线也不可串接,为的是防止增加衰减为的是防止增加衰减时间时间,并防止同时断路的发生并防止同时断路的发生.ESD Ground静电接地静电接地(2)393.Any insulator materials which make contact with or come within twelve(12)inches of the semiconductor devices as they pass through the test equipment should be replaced(where practical)wi
26、th antistatic or static dissipative materials.If this is not feasible,the insulator materials should be treated with an antistatic solution.In addition,any metal parts in the test equipment which come in contact with semiconductor devices at any time should be grounded.This is especially important t
27、o avoid the charged device model failures in highly sensitive semiconductor devices.3.电性测试设备上的任何绝缘物若会接触到或靠近半导体材料电性测试设备上的任何绝缘物若会接触到或靠近半导体材料12 英吋以内时应英吋以内时应以以 抗静电或静电传导物取代之抗静电或静电传导物取代之.如果不可能的话如果不可能的话,则该绝缘物必须用抗静电溶液处理则该绝缘物必须用抗静电溶液处理 过过.此外此外,测试机台上的金属零件部份若会接触到半导材料时则该金属部份无论测试机台上的金属零件部份若会接触到半导材料时则该金属部份无论3.何时均
28、要接地何时均要接地.是非常重要的是非常重要的,可以避免高敏感的半导体材料因静电而受损伤可以避免高敏感的半导体材料因静电而受损伤.ESD Ground静电接地静电接地(3)404.Impedance of equipment grounding conductor is less than 1.0 ohm.设备接地导线的阻抗需小于设备接地导线的阻抗需小于 1 欧姆欧姆.Note:Alligator clip for wrist strap is not allowed to use.鳄鱼夹头禁止使用鳄鱼夹头禁止使用.ESD Ground静电接地静电接地(4)41Gloves/Finger coa
29、ts手套手套/手指套手指套1.Only cotton gloves,antistatic/conductive gloves,or antistatic/conductive finger cots should be used for handling ESDs devices.当需要用手套或手指套时当需要用手套或手指套时,只有棉手套只有棉手套,抗静电抗静电/导电手套或抗导电手套或抗 静电静电/导电手指套可用来处理静电敏感材料导电手指套可用来处理静电敏感材料.1.People handling ESDS devices.They should use the gloves,finger co
30、ts or gloves with fang cots.处理静电敏感材料时处理静电敏感材料时,可只用手套可只用手套,手指套或手套加上手指套手指套或手套加上手指套.42Storage Areas储存地区储存地区1.When the storage shelving is not an ESD protected area or workstation,the ESDS devices shall be in ESD protective packaging.若储物架不是一个静电防护区域或工作站若储物架不是一个静电防护区域或工作站,则静电敏感则静电敏感 材料必须置于静电防护包装物中材料必须置于静电
31、防护包装物中.2.The ground chain for trailers(for Wipe/finish good)enough to completely contact with ground and keep the chain clean,replacing a new one if necessary.1.装载材料成品的推车必须要有接地鍊条装载材料成品的推车必须要有接地鍊条,其长度要其长度要能能 够完全与地面接触够完全与地面接触,并保持干净整洁并保持干净整洁,若不洁净则必需若不洁净则必需 更换之更换之.43 Mobile Equipment可移动的设备可移动的设备Mobile e
32、quipment(e.g.,carts,chairs,tables shall not generate electrostatic voltages greater than+/-200V(TCP100V)within twelve(12)inches of unprotected ESDS devices during use.可移动的设备可移动的设备(例如例如:车子车子,椅子椅子,桌子桌子)在使用时若接近未受保护在使用时若接近未受保护的静电敏感材料的静电敏感材料 12 英吋以内不得产生大于英吋以内不得产生大于+/-200(TCP100V)伏特之静电压伏特之静电压.44Methods fo
33、r Minimizing Static Charging低静电的方法低静电的方法Antistatic Solution 抗静电液抗静电液Antistatic chemicals(antis tat solutions)can be used to prevent static charge generation on static generating/charging materials in the workor storage areas.During application of any antistatic chemical,the user must consider the fo
34、llowing:抗静电化学物抗静电化学物(抗静电液抗静电液)可以用来防止在工作或储存区的静电产生或充电可以用来防止在工作或储存区的静电产生或充电物发生静电充电物发生静电充电.在使用任何抗静电化学物时在使用任何抗静电化学物时,使用者应考虑下列使用者应考虑下列:1.抗静电液要选择不会污染静电敏感材料者抗静电液要选择不会污染静电敏感材料者.2.抗静电喷剂或溶液不可用于能够产生能量的电气部份或设备上抗静电喷剂或溶液不可用于能够产生能量的电气部份或设备上.3.当装置或包装体直接暴露在喷雾下时不可使用抗静电溶液当装置或包装体直接暴露在喷雾下时不可使用抗静电溶液.4.静电溶液需要的程度以及使用频率要根据在正
35、常作业下使静电溶液需要的程度以及使用频率要根据在正常作业下使 用静电伏特计来做静电压量测的结果来做决定用静电伏特计来做静电压量测的结果来做决定.45Methods for Minimizing Static Charging 低静电的方法低静电的方法 Relative Humidity Control相对湿度的控制相对湿度的控制Relative humidity has a significant impact on the generation of static electricity and its control is recommended where practicable.相对湿
36、度对静电产生有很大的影响如有能力最好要加以控制相对湿度对静电产生有很大的影响如有能力最好要加以控制.Note:The recommended minimum humidity is 40%R.H.注注:建议最小的湿度为建议最小的湿度为 40%R.H.46Methods for Minimizing Static Charging 低静电的方法低静电的方法Training训练训练Its the responsibility of each area supervisor to make sure that his/her people receive ESD control training i
37、nitially for working in handling ESDS items.每一区域的主管必须确定其操作静电敏感材料的人员每一区域的主管必须确定其操作静电敏感材料的人员,须受过须受过 ESD的训练的训练.Note:Personnel entering ESD protected areas should receive ESD awareness training.注注:进入静电防护区域之人员必须受过静电认知训练进入静电防护区域之人员必须受过静电认知训练.47Check List检查表检查表(1)1_Does the calibration system for all inspe
38、ction,measuring and test equipment used to perform required ESD item checks listed in Table 1 meet the TITL calibration requirements of TQ-General 01002 有有ESD量测仪器是否都有校正量测仪器是否都有校正,且都在有效期内且都在有效期内?2 _ Are grounded flooring or floor mats covering the floor areas where personnel or mobile ESD protective
39、workstations are using floor grounding methods?使用静电防护鞋的工作区域是否配合有接地良好之静电防护地板使用静电防护鞋的工作区域是否配合有接地良好之静电防护地板?3 _ Is each person handling or within twelve(12)inches of unprotected ESDS devices grounded by either a wrist strap or ESD protective footwear?在接近在接近ESDS产品产品(即即IC材料材料)12英吋范围内的人员是否都有戴静电手环或穿静电鞋英吋范围内
40、的人员是否都有戴静电手环或穿静电鞋?4 _ When personnel floor grounding methods are used,is the ESD protective footwear worn on both feet?是否所有人两只脚都穿有静电鞋是否所有人两只脚都穿有静电鞋(不能只穿一支脚不能只穿一支脚)?5 _ Are nonessential and personal items kept off of the ESD protective work surfaces?静电防护工作桌面上是否没有不必要的东西或私人用品静电防护工作桌面上是否没有不必要的东西或私人用品?6
41、_Are the static voltages generated by essential materials/items less than+/-200 volts(top 100V)within twelve(12)inches of unprotected ESDS devices?在接近在接近ESDS产品产品(即即IC材料材料)12英吋范围内是否没有会产品大于英吋范围内是否没有会产品大于+/-200V(TCP100V)静电压的任何物品静电压的任何物品?7 _ When ESD protective smocks are used,do the smocks cover all pe
42、rsonal garments above the waist except at the neck area?静电服是否能盖到由腰部以上静电服是否能盖到由腰部以上(颈部除外颈部除外)的部位的部位?8_ Where unprotected ESDS devices are handled,are grounded static dissipative work surfaces used?处理处理ESDS产品产品(即即IC材料材料)时时,是否在接地良好的静电防护工作桌面上处理是否在接地良好的静电防护工作桌面上处理?489 _ Are ESD caution signs posted at ea
43、ch ESD protected workstation and/or at the entrances of defined ESD protected areas?是否在静电防护区域的入口或工作桌区域有一静电防护的是否在静电防护区域的入口或工作桌区域有一静电防护的”警式广告牌警式广告牌”?10 _ Are the daily wrist strap checks being performed and recorded the results?静电手环是否每班做检查及记录检查结果呢静电手环是否每班做检查及记录检查结果呢?11 _ Does the wrist strap resistanc
44、e measurement path go from the wearers hand,through the users body,the body-to-strap contact,the integral resistor,the strap wire,to the strap ground connector?静电手环检测是否由穿戴者的手静电手环检测是否由穿戴者的手,使用者的身体使用者的身体,静电环内阻静电环内阻,一直到静电接地做一回路电阻值量测一直到静电接地做一回路电阻值量测.12 _ Are the daily ESD protective footwear checks bein
45、g performed and recorded the results?静电鞋是否每班做量测与记录呢静电鞋是否每班做量测与记录呢?13_ Are the ESD ground connection visual checks being performed weekly?所有静电接地所有静电接地,如静电手环如静电手环,桌垫桌垫.,静电地板的接地联接是否每周目检一次静电地板的接地联接是否每周目检一次?14 _ Are the monthly ESD protective smock static voltage checks being performed and kept record?静电
46、衣的静电压是否每个月侦测一次并记录其电压值静电衣的静电压是否每个月侦测一次并记录其电压值?15 _ Are the ESD protected area and workstation static voltage surveys being performed&record monthly?生产线上生产线上ESD保护区域和工作桌区域的静电压是否每个月检检测一次保护区域和工作桌区域的静电压是否每个月检检测一次.并记录其电压值并记录其电压值?16 _ Are the ESD protective static dissipative work surface to ESD ground resi
47、stance checks being performed&recorded quarterly?ESD防护工作桌面防护工作桌面(静电消散桌面静电消散桌面)到其接地的电阻是否每季检测一次并记录到其接地的电阻是否每季检测一次并记录Check List检查表检查表(2)4917_ Are the ESD protective floor to ESD ground resistance checks being performed per&recorded quarterly?ESD防护地板到其接地的电阻是否每季检测一次并记录其电阻值防护地板到其接地的电阻是否每季检测一次并记录其电阻值?18_ A
48、re the ESD ground continuity checks being performed&recorded quarterly?静电接地静电接地,如静电手环如静电手环,工作桌面工作桌面,地板等的接地线是否每季量测一次并记录其电阻值地板等的接地线是否每季量测一次并记录其电阻值?19_ Are the ionize balance checks being performed per&recorded semi-annual?离子风扇的离子风扇的balance电压和电压和Decay Time是否每半年校正一次并有记录是否每半年校正一次并有记录?20 _ When used,are t
49、he air ionizes aimed at the devices and operators hands rather than at the operator?离子风扇是否朝向处理材料的双手离子风扇是否朝向处理材料的双手,而非朝向而非朝向operator?21 _ Is an annual ESD system compliance check to the requirements of this standard being performed?每一工作区域是否每年做一次检查每一工作区域是否每年做一次检查,看是否符合此静电管制规格的要求看是否符合此静电管制规格的要求?22 _Whe
50、n compliance to the daily,weekly,quarterly,semiannual,and/or annual checks is not continuously maintained,are the checks performed a double frequency?如果任何定期的测量不通过其量测频率是否增加一倍呢如果任何定期的测量不通过其量测频率是否增加一倍呢?23_ Are records of the ESD item checks maintained at least 2 years minimum requirement.所有所有ESD量测的记录量测
