1、半导体厂常用缩写词语汇编ISEPIndustrial safety and environmental protection工业安全环保ESHEnvironment safety and health环保安全卫生ERCEmergency Response Center紧急应变中心GMSGas Monitoring System气体监测系统FAFire Alarm system火灾报警系统VESDAVery Early Smoke Detection Apparatus极早期烟雾探测设备SPMSingle Point Monitoring Gas Detector单点气体侦测器SCBASelf-
2、Contained Breathing Apparatus自给式空气呼吸器ISOInternational Organization for Standardization国际标准化组织4in1CO, H2S, O2, LEL in one detector四合一侦测器LELLow Explosive Level气体爆炸下限LAULeak Alarm Unit气体警报灯UV/IRUltra-Violet Infrared紫外红外火焰探测器SDSSafety Data Sheet安全资料表FACFacility厂务CUPCentral Utility Plant中央动力厂房I&EInstrume
3、nt and Electric Section仪电系统课FMCSFacility Monitoring Control System厂务监控系统MCCMotor Control Center马达控制中心VFDVariable Frequency Device变频器PAPublic Address system公共广播系统LCMLighting Control Management电灯管理系统SCADASupervisory Control And Data Acquisition监视控制和数据搜集系WTEWater Treatment Engineering Section水处理课UPWUlt
4、ra-Pure Water超纯水DIDeionizeWater去离子水ICWIndustry City Water工业用水CWCity Water自来水PCWProcess Cooling Water制程冷却水PVProcess Vacuum制程真空CVHouse Vacuum清洁吸尘AWDAcid Waste Water Drain一般废水N-AWDAmmonia Waste Water Drain含氨废水HFDHigh Fluoride Waste Water含氟废水LSRLocal Scrubber Recycle Water洗涤塔回收水RCWReclaim water制程回收再利用水B
5、GWBackgrounding Waste Water晶背研磨废水CMPDChemical Mechanical Polishing Drain化学机械研磨废水ROReverse Osmosis逆渗透膜TOCTotal Organic Carbon总有机碳MBMixed Bed混床UFUltra Filtration超滤SC SA WA DO MDGC GC VMB VMP PN2 GN2 CDA CQC CDS SDSBulk Gas Inert Gas Toxic Gas BSGS DCSMECH GEXStrong Cation强阳离子Strong Anion强阴离子Weak Anion
6、弱阴离子Dissolved Oxygen溶解氧Membrane Degasify脱气膜Gas and Chemical System Section气化课Gas Cabinet气瓶柜Valve Manifold Box阀箱Valve Manifold Panel阀盘Purification N2纯化氮气General N2一般用氮气Compressor Dry Air压缩干燥空气Continuous Quality Control连续品质控制系统Chemical Dispense System化学系统Slurry Dispense System化学研磨系统为大气中普遍存在之制程气体, 如 N2
7、, O2, Ar等为一些特殊无强烈毒性的气体, 如 NH3, CF4, CHF3, SF6等为具有强烈危害人体的毒性气体, 如 SiH4, Cl2, BCl3等.Bulk Special Gas Supply System大宗特殊气体供应系统Dichloro Silicane二氯甲硅烷Mechanical System Section机械系统课General Exhaust普通及热排气SEXScrubber Exhaust酸排气VEXVOCs(Volatile organic compounds) Exhaust有机排气AEXAlkaline (Ammonia) Exhaust碱性排气BMSB
8、uilding Management System办公楼空调系统AHUAir Handling Unit空调箱MAUMake-up Air Unit外气空调箱VAVVariable Air Volume box可变风量风箱FFUFan Filter(ULPA) Unit风扇过滤单元HEPAHigh Efficiency Particulate Filter高效率过滤器ULPAUltra Low Penetration Filter超高效率过滤器A/SAir Shower风淋室FDFire Damper防火风门FSDCombined Fire Smoke Damper组合式防火防烟风门SDSmo
9、ke Damper防烟风门PHXPlated type Heat Exchanger板式热交换器DCCDry Cooling Coil干盘管FCUFan Coil Unit小型冷风机SFSmoke Fan消防排烟风车EFExhaust Fan通风排气风车VENVent排气ASAir Supply一般送风L/CLocal Scrubber洗涤塔C/SCentral Scrubber中央洗涤塔C/T PMSH&S CCTV其它FAB MFG IC CIM OI OPI PM SOP SPCCp Cpk OOC OOS OCAP FMEA WIPCooling TowerParticle Monit
10、oring SystemHookup and Site Service Close Circuit TelevisionFabrication Manufacturing Integrated CircuitComputer Integrated Manufacturing Operation Instruction manual Operation InterfacePreventive Maintenance Standard Operating Procedure Process Statistical Control Process CapabilityProcess Capabili
11、ty indexOut Of Control Out Of SpecOut Of Control Action PlanFailure Mechanism Effect Analysis Wafer In Process冷却塔环境微粒监测系统二次配和厂区服务闭路电视常指半导体生产的制造工厂制造部集成电路电脑整合制造操作指导手册操作界面预防保养标准操作程序制程统计管制工艺能力工艺能力指数超出控制界线超出规格界线超出管制界线的相应对策故障模式及结果分析在制品SEM TF LITDIFScanning Electron Microscope Thin FilmLithographyDiffusion
12、扫描式电子显微镜薄膜微影扩散ETCEtch蚀刻PVDPhysical vapor deposition物理气相沉积CVDChemical vapor deposition化学气相沉积IMPImplantation of ion离子植入CMPChemical Mechanical Polishing化学机械研磨I/OInput/Output输入 /输出DI/DODigital Input/ Digital Output数字输入 /数字输出AI/AOAnalog Output/Analog Output模拟输入 /模拟输出LEDLight Emitting Diode发光二极管PCBPrinted Circuit Board印刷电路板PLCProgrammable Logic Controller可编程式逻辑控制器
