1、真空概念真空概念&机台专有机台专有名词导读名词导读 李海波A0 -7-3ATM PIG High PIG Low IG High IG LowVacuum chamberCompressorunitRPIGPiG2PS2PiG1MVMBPS1v1v2N2N2v4Helium gas flowCooling waterCryo-uRBHRV2RV3RV1v3PRN21.第一級冷凝500K800K 水氣與二氧化碳。2.第二級冷凝10200K 氮氣、氧氣、氬氣。3.活性炭吸附級 氫氣、氦氣、氖氣。Cryo PumpGasHe.Low TempHe.High TempCooling WaterFirs
2、t CondensationSecond CondensationGasWater inWater outCompressorOil filterAbsorberStart up rege.Close main valveShut off cryopumpBand heater onIntroduce dry N2Atm pressurePurge dry N2Complete warm upStop dry N2yesyesnonoRough pump the cryopumpComplete rough pumpBand heater offnoyesStart up cryopumpComplete cool downComplete rege.noyes
