1、Technology of Thin Film:IntroductionOutline1.Concept of thin film2.Difference between thin film and block material3.History of thin film and coatingd4.Modern technology for thin film deposition5.The content of this course2What is the“thin film”34567891011l a very thin layer of a substance on a suppo
2、rting material;especially:a coating(as of a semiconductor)that is deposited in a layer one atom or one molecule thickl Thin film:thickness less than 1 micrometerl Coating:thickness lagrer than1 micrometerWhat is the thin film？12Difference between thin film and block material13Thin film vs.block mate
3、rialBolckThin filmDensityMelting pointCrystalline sizesmall（um)Large(mm)142.Thin film vs.block material-1BolckThin filmDensityMelting pointCrystalline sizesmall（um)Large(mm)15Density g/cm3Temprature of substrate16Thin film vs.block materialBolckThin filmDensitybtf（有问题）（有问题）Melting pointMbMtfCrystall
4、ine sizesmall（um)Large(mm)172.Thin film vs.block material-1BolckThin filmDensitybtf（有问题）（有问题）Melting pointMbMtfCrystalline sizesmall（um)Large(mm)18Melting point ()Thickness(?)192.Thin film vs.block materialBolckThin filmDensitybtf（有问题）（有问题）Melting pointMbMtfCrystalline sizesmall（um)Large(mm)202.Thin
5、 film vs.block material-1BolckThin filmDensitybtf（有问题）（有问题）Melting pointMbMtfCrystalline sizesmall（um)Large(mm)212.Thin film vs.block material-2-2Stoichiometric ratio Non-stoichiometry is common in thin film SiO2 SiOx Transparent conductive film Tin indium oxide(InSnyOx)Conductivity condConductiveco
6、nd 22 Comparing to bulk materials,thin film materials have some unique properties233.The History of Thin Film or CoatinglApplication in ancient timelApplication in morden time2425 The process of“liujing”Making AuHg alloy(煞金煞金)Brushing Au compound(抹金抹金)Evaprating Hg(开金开金)Making Au denser（密集的密集的）(压光压光
7、)26BronzeBronze（青铜）（青铜）Mirror Polishing Mirror Polishing27Bronze Mirror PolishingBronze Mirror PolishingBronze mirror from easten han dynasty There is Sn rich transparent layer with several hundred nanometer thickness on the surface of mirror.Dense SnO2 films with microcrystallines are detected on t
8、he top of the Sn rich layer.28Glazing 上上 釉釉Glazing for ceramic beautiful clean29Application in Modern TimeApplication in Modern TimelElectronic thin filmlOptical thin filmlMagnetic thin filmlMechanical functional thin film30 Electronic thin film Conductive thin film and dielectric（介电）（介电）thin film f
9、or semiconductive dives and integrated circuit（集成电路）（集成电路）Al、polysilicon、SiO2 Superconductive thin film YBaCuO Photoelectric(光电的光电的)thin film GaN、GaAs/GaAlAs、a-Si/a-SiC Thin film resistor（电阻）（电阻）,thin film capacitor（电容）（电容）Ni-Cr low resistance thin film resistor Thin-film solar cellelectroluminescen
10、ceConductive thin filmIC31 Electronic thin film Flat plate display ITO transparent conductive thin film、Y2O3、Ta2O5 dielectronic thin film，Al electrode thin film Piezoelectric(1.压电的)thin film for wave filtering ZnO、AlN Sensitive thin film for sensor SnOx32 Optical thin film薄膜薄膜 Antireflective(1.减反射)t
11、hin film MgF2 ZnS2 Reflective film Information store thin film TbFeCo Dieletric and semiconductive thin film for optical device and light guide Solar control thin film Ti、ITO 光开关光开关33 Magnetic thin film Giant magnetoresistance thin film34 Hard coating,anti-corrosion and lubricating coatings TiN、NiCr
12、AlY、MoS2 Decorative coating 仿金仿金TiN、黑色、黑色TiC35 The application of thin films or coatings has a long history Thin films are applied in everywhere in our morden society,such as energy,materials and information.Mastering the technology for thin film would be useful for your further development!364.Mord
13、en deposition technology of thin filmGrowth from bottom to up（向（向外生长）外生长）Gas Solid(Vapor deposition气相沉积气相沉积)Physical vapor depositionChemical vapor depositionLiquid SolidSpray method（喷涂法）（喷涂法）Sol-gel（溶胶凝胶）（溶胶凝胶）methodIon and molecule in solutionEletrochemistry methodLangmuir-Blodgett methodMolecular
14、 self-assembly Solid37(3.装配,组装,总成)4.Morden deposition technology of thin film Ion implantationGrowth from up to bottom（向内生长）（向内生长）38Physical vapor deposition（PVD）Atoms or ionsCoatingsSubtrateTarget or evapration source Eavpration/supttering process39Chemical vapor deposition（CVD）Thermal decompositio
15、n Reaction on surface of substrate40 The process of chemically reacting a volatile compound of a material to be deposited,with other gases,to produce a nonvolatile solid that deposits atomistically on a suitably placed substrate.4.Morden deposition technology of thin filmGrowth from bottom to upGas
16、Solid(Vapor deposition)Physical vapor depositionChemical vapor depositionLiquid SolidSpray methodSol-gel methodIon and molecule in solutionEletrochemistry methodLangmuir-Blodgett methodMolecular self-assembly Solid41Spray Processl Heating spraied materials to meltingl Blow the materials to the subst
17、rate42Sol-Gel Method43Spray Processl Heating spraied materials to meltingl Blow the materials to the substrate444.Morden deposition technology of thin filmGrowth from bottom to upGas Solid(Vapor deposition)Physical vapor depositionChemical vapor depositionLiquid SolidSpray methodSol-gel methodIon an
18、d molecule in solutionEletrochemistry methodLangmuir-Blodgett methodMolecular self-assembly Solid45Electrochemical deposition（Eletroplating）An ionic metal is supplied with electrons to form a non-ionic coating on a substrate.The external electrical power is used.A common system involves a chemical s
19、olution with the ionic form of the metal,an anode(positively charged)which may consist of the metal being plated(a soluble anode)or an insoluble anode(usually carbon,platinum,titanium,lead,or steel),and finally,a cathode(negatively charged)where electrons are supplied to produce a film of non-ionic
20、metal.化学镀化学镀Electrochemical deposition（Eletroless plating）Also known as chemical or auto-catalytic plating,is a non-galvanic plating method that involves several simultaneous（同时发生的）（同时发生的）reactions in an aqueous（水的）（水的）solution,which occur without the use of external electrical power.One or more mon
21、olayers（单层）（单层）of an organic material,deposited from the surface of a liquid onto a solid by immersing(or emerging)the solid substrate into(or from)the liquid.Molecular Self-assembly Molecular self-assembly is the process by which molecules adopt a defined arrangement without guidance or management
22、from an outside source.The DNA structure at left(schematic shown)will self-assemble into the structure visualized by atomic force microscopy at right.5.The Content of this Course5.The Content of this Course How to prepare thin film by vacuum deposition Technology of vacuum deposition(vapor depositio
23、n)Equipments and their mechanism The factors affecting film final structure Film forming process and mechanism(nucleation and growth)5.The Content of this Course5.The Content of this Course How to characterize?Measurement of thickness and deposition rate Determination of chemical composition Analysis of microstructure Thin film properties testingReference Book52 Milton Ohring:Materials Science of Thin Films:deposition&structure,Second editionAssessment Attendance rate and Homework 10%Final exam 90%53Any questions?Any questions?54
