1、centrotherm扩散炉设备培训 equipment training of centrotherm Diffusion furnace 1PPT课件ALoading box 推舟部分B.TGA 有毒气体排放C.Heating furnace 加热部分D.Gas cabinet 气柜2PPT课件1、CMI电脑2、Loading box上料箱3、Toxic gases 有毒气体排放4、Furnace 炉体 5、Gas box 气源柜3PPT课件Baddle head舟头Loading wafer加栽的硅片4PPT课件Mechanical arm 机械臂5PPT课件 Storage rack
2、1，2 存储位1、2 Paddle bearing,adjustable paddle position 碳化硅桨支座，调节桨位置6PPT课件quartz door石英门Door cylinder炉门气缸7PPT课件1、CMS module 3、Power connection cover2、Thermocouple connection 4、Temperature sensor module 8PPT课件1、Flow meter 气体流量计2、Pneumatic valve 气动阀129PPT课件Cooling to the top of the furnace body and furna
3、ce 对炉膛顶部和炉体进行冷却10PPT课件On the POCL3 constant temperature process,normal temperature 20 degrees对POCL3进行恒温作用，正常工艺温度20度11PPT课件Bearing quartz and silicon,and out of the carrier ship承载石英舟和硅片石英舟进出的载体12PPT课件Detection of a range of whether object,avoid hit boat phenomenon,this range can be adjusted检测某个范围内是否有
4、物体，避免出现撞舟现象，些范围可进行调节13PPT课件14PPT课件 C o m m u n i c a t i o15PPT课件1、Heat exchanger2、Cooling3、Shutoff valve 1、Cooling 4、Heat exchanger2、The main fan 5、Electronic devices 3、Cooling the air passage16PPT课件17PPT课件1operation panel 4 keyboard2Touch screen 5 touch screen button 3USB socket18PPT课件The equipmen
5、t has the following button1Stop action-All the mechanical action of loading box are stop2Loading box lighting-openclose the lamp of the loading box3Autohand manual switch-Loading and unloading of the operating system can manual operation in an open feeding box4 Allows to unlock-Press this button,to
6、unlock the car19PPT课件1 pushbutton ABC keyboard call 4 pushbutton right mouse button2Pushbutton task change 5 pushbutton shift3Pushbutton brightnessABC keyboard call-calls upclosses the keyboard on the touchscreen,keyboard entries can be carried out directly on the touchsceen.Pushbutton task change-c
7、hanges a task windowsPushbutton brightness-press this button together with the shife button to increase the brightness of the touchscress.Pushbutton right mouse buttonopens right mouse button context menu,press this button together with the shift button to reduce the touchscreen.Pushbutton shiftcall
8、s up the second keyboard level,push this bushbutton together with the required function button.20PPT课件1System name 7 alarm close 2Date time 8 notes3Centrotherm logo and system 9 additional information Information button4Current display area in the 10 system mode Information field 11 connection state
9、 with CECGEM5System status6Loginlogout button21PPT课件1 Jobs 4 setup2 System 5 alarms3 Datslog 6 help(online help)22PPT课件1Title bar 3 navigation bar2Command bar 4 information field with variable field areas 23PPT课件上图是CESAR的界面：1.系统工艺状态 2.工艺时间状态 3.时间日期 4.气体流量状态 5.系统准备状态 6.温度检测显示This is a CESAR interface
10、：1.System process 2.Process time 3.Time and date 4.Gas flow state 5.System readiness 6.Temperature detection and display24PPT课件1.SLS1.SLS处处于于“UPUP”位置位置时时，管，管内内有舟有舟时时不可手不可手动进桨动进桨 SLS in the UP position,the inner tube has a boat can not be manually into the paddle.2.SLS2.SLS处处于于“DOWNDOWN”位置位置时时，桨桨上有舟上
11、有舟时时不得手不得手动进动进舟。舟。SLS in the DOWN position,the paddle is not manually into the boat boat.3.3.桨桨上有舟上有舟时时，舟不在正确位置，不准切，舟不在正确位置，不准切换换到自到自动运动运行行模式。模式。Oars on a boat,the boat is not in the correct position,are not allowed to switch to automatic running mode.25PPT课件4.4.进进舟、舟、退退舟舟失失败败报报警警时时，一一定定要要检检查查舟舟的的位位
12、置置 是是否否在在合合理理的的位位置，置，才才可可以以对对报报警警进进行行复复位，位，自自动动/手手动动的的切切换换要要谨谨慎慎，若若舟舟不不在在正正确确位位置，置，请请手手动动移移至至正正确确位位置置后后再再对对报报警警进进行行复复位位（炉炉门门以以桨桨的的位位置置作作为为开开闭闭标标准）准）Into the boat,boat back failure alarm,be sure to check the boat position is in a reasonable position,can alarm reset,automatic/manual switch must be car
13、eful,if the ship is not in the correct position,please manually moved to the correct position after the alarm reset(door to paddle position as opening and closing standard)26PPT课件5.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。When the boat is located on the storage rack(storage2,3),make sure t
14、hat the storage rack sensor is sensed,otherwise may cause the bumped boat.6.从手动切换自动时，Grip一定要在Middle位置，否则机械臂可能因无法正常运行而报警。From manual automatic,Grip must be in the Middle position,or mechanical arm may be due to normal operation and alarm.27PPT课件7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及 Tube=ready SLS=UP TGA=YES 然后进
15、行操作。In the boat,technology cannot run,make sure the boat on the oar position,as well as Tube=ready SLS=UP TGA=YES then operation.8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。9.单一炉管有故障时，应该及时琐闭并降温，以节约能源。Single tube
16、has fault,should be timely and closed and cooling,in order to save energy.28PPT课件1.Process recipe has terminated with error state AC 进行中的工艺以错误状态结 束警报确认To store 储存To store enable unload 储存并缷下Restart recipe重新开始工艺A用于选错工艺号，手动结束工艺，重新开始新的其他工艺时进行选择B多数情况下选择此项C工艺中断需要重新进行时选择，但不建议使用，建议选择（B）Process recipe has t
17、erminated with error state AC Ongoing process to end the error status Alarm confirmation To store To store enable unload Restart recipe A Used the wrong process number，Hand end of the process，Start a new choice when other processes B In most cases,choice this one C Interrupts need to re-process the
18、selection,but not recommended,recommended to choose(B)。29PPT课件2.Boat already in tube-Select:Process=0.Unload=1(.)选择0或1 说明：当管内有舟存在时，异常排除 后手动运行工艺时会出现此提示2.Boat already in tube-Select:Process=0.Unload=1(.)Description:When the tube has a boat there,the exception rule out runningprocess manually after thi
19、s prompt will appear.30PPT课件3.Lost homing check poti 失去引导，检 查位置（一般此警报会自动解除）说明：此警报会自动解除，但需要 检查一下桨是否在原点位置即可 Lost homing check poti Check the location(usually the alarm will be automatically lifted)3.Description:This alarm will be automatically lifted,but need Check whether the origin location to paddl
20、e31PPT课件4.Recipe abort 2-process abort to continue:enter AB 工艺退出运行终止！继续，请输入AB 说明：对工艺异常结束的手动确认，然后就会出现报警 Recipe abort 2-process abort to continue:enter AB Description:The manual confirmation process ends,5.Recipe couldnt be started please check protocol for reason!工艺不能运行，请检查原因 Recipe couldnt be starte
21、d please check protocol for reason!32PPT课件.6.Boat sensor of grad has changed without permission 机械手上的传感器被非允许的改动 说明：机械臂在上下移动的时候，前后不能移动，若前后位置发生移动机械将被锁定，出现报警，此报警需设备人员的密码登陆在Handing 对话框中的Tech模式下进行复位Boat sensor of grad has changed without permission Description:The robotic arm to move up and down when you
22、 can notmove around,if the location is moved around the machine will be locked,an alarm,the alarmequipment,personnel need to log in a password dialog box in the Tech Handingreset mode33PPT课件 7.There is already an active recipe 工艺名 from local tisting 已有工艺在此管的工艺列表中 说明：这两个报警经常出现，若能够确认此管未有 工艺在运行，就必须将此管重
23、新启动，如果有工艺运行，可以将工艺手动停止，或者等待工艺结束。There is already an active recipe from local tisting Description:This two alarms are frequent,if not able to confirm this process in the run pipe,this pipe must be restarted,if process is running,you can stop the process manually,or wait for the process ends.34PPT课件8.T
24、ube ready in undefined.Please ensure that the cesar loading machine is at“0”position and softlander is“up”管子的状态无法被确认，请确保CESAR接收到桨在“0”和“up”的位置。9.Boat collision 舟被撞击10.The boatsensor has detected no boat in the grap although a boat should be in the grap.Please check boat in grap sensor and try again.虽有一个舟在机械手上，但传感器感应不到，检查舟是否接触到传感器后再试一次。35PPT课件 11.Water flow flange TGA(gas side)st1.冷却炉报警12.Grab sensor undefined No movement possible!Check boat position.传感器不明确，无法移动，检查舟的位置。13.Boat position(speed)out of 1ST(2ND)tolerance 舟的位置（速度）超过第一个（第二个）限值36PPT课件
