1、2022-11-1021.概述2022-11-1042022-11-1052022-11-106tan200fytan2 fy2200fyfy00yyff2022-11-107 DCDykff000 1111222202222000kyDffkyDff 2022-11-108 /00ff0yDkkB/%15.0001.06003.024005.0001.02222ff%24.0ff2022-11-109 pNfyyf12 2022-11-1010精密测角法测量原理图tan0yf 2022-11-10112022-11-1013afU夫朗和斐圆孔衍射图艾里斑2102)(2aJII2022-11-
2、1014a22022-11-1015afU夫朗和斐圆孔衍射图艾里斑2022-11-10162022-11-1017Da61.0261.021max61.000maxfDfd2022-11-1018/5.0tanfDU UUmaxmaxsinUnNA 2022-11-1019fDfDfx042.1)636.1678.2()(12180603250 xfD21.0 2022-11-10202022-11-10222022-11-10232022-11-1024FDf22.122.10F02.10F947.002022-11-1025fa001N02022-11-1026D22.1D02.1D947
3、.0F22.11F02.11F947.01NA61.0NA51.0NA47.02022-11-102733coscos11NNttcoscos11NNss100806004020204060Nt/N,N s/N(%)Ns/NNt/N理论分辨率随视场理论分辨率随视场变化的曲线变化的曲线2022-11-10282022-11-102994387.02/112q2.1 分辨率图案分辨率图案ZBN35003-89国家专业标准图案例：国家专业标准图案例：线条宽度线条宽度 宽度宽度P按等比级数按等比级数规律依次递减规律依次递减 PP0 q n-1 ；P0160m；n185 P841.25m分组分组 将将8
4、5种不同宽度的分辨率线种不同宽度的分辨率线条分成七组，通常称为条分成七组，通常称为1号到号到7号板，号板，即即A1A7分辨率板。分辨率板。每号分辨率板包含有每号分辨率板包含有25种不同宽度的分辨率线条；种不同宽度的分辨率线条；相邻两号分辨率图案之间有一部分单元是彼此重复的相邻两号分辨率图案之间有一部分单元是彼此重复的；同一宽度的分辨率线条又按四个不同的方向排列构成一同一宽度的分辨率线条又按四个不同的方向排列构成一个个“单元单元”2022-11-1030cf)(2062652cfPa2022-11-1031)(mm /-10ffNNc2022-11-10321cos1fx332cos12cos1
5、cos2cttffPafP220coscos21NffNPNctt2022-11-10342cos12cos1cos2cttffPafP220coscos21NffNPNcttcoscos210NffNPNcss2022-11-10352022-11-10362022-11-10372022-11-10382022-11-10392022-11-104011111cossinxyr1111111111111 cossin(,)0 cossinxyrT x yxyr2022-11-10411111111 cossin,0 cossinrWWxyRWWTrWWxyxyR111cossinrWWxy
6、R2022-11-104222(,)()W x yD xy111cossin2rxyDR10 12rxDR2022-11-104312rxDR2022-11-104422222(,)()()W x yA xyD xy221112 2()(cossin)rA xyDxyR2022-11-1045321024rDyxyAAR2022-11-1046321024rDyxyAAR3202DyxyA2220DyxAy 2022-11-1047 刀口阴影法检验1.刀口阴影法基本原理 刀口阴影法检验1.刀口阴影法基本原理2022-11-1049 刀口阴影法检验1.刀口阴影法基本原理2022-11-10502
7、022-11-10512022-11-10522022-11-10542022-11-10552022-11-1056 dd),(),(),(vuvuvuhvuovui2022-11-1057 vuvuvuhvuovuidd),(),(),(2022-11-1058),(),(vvuuhvuvuh2022-11-1059 vuvvuuhvuovuidd),(),(),(2022-11-10602022-11-1061 vuvuhvuhvuPSFdd),(),(),(vuvvuuPSFvuovuidd),(),(),(2022-11-1062vuvvuuPSFvuovuidd),(),(),()
8、,(),(),(srOTFsrOsrIvusvruvuPSFsrOTFdd)(j2exp),(),(2022-11-1063(,)(,)expj(,)OTF r sMTF r sPTF r s2022-11-1064vuruvuPSFrOTFdd)j2exp(),()0,(1 vvuPSFuLSFd),()(2022-11-1065uuruLSFrOTFd)j2exp()()()(jexp)()(rPTFrMTFrOTF2022-11-1066uuuouLSFuuuLSFuouid)()(d)()()(2022-11-1067)2cos()(0urIIuoa2022-11-1068)(2cos
9、)(2sin)(2cos)(2sind2sin)(2cosd2cos)()(000rPTFrurMTFIIrurHIrurHIIruuruuLSFIururuuLSFIIuiasacaaauruuLSFrHuruuLSFrHrHrHrPTFrHrHrMTFsccscd)2sin()()(d)2cos()()()(/)(arctan)()()()(s222022-11-1069)()()(0rCrCrMTFiminmaxminmaxIIIIC)(jexp)()(rPTFrMTFrOTF2022-11-10712(,)(,)expj()d dASF u vCP x yuxvyx yR2022-11
10、-10722(,)exp j(,)(,)0 A x yW x yP x y在光瞳内在光瞳外2022-11-1073*(,)(,)(,)PSF u vASF u v ASF u v*(,)(,)exp 2j()d d(,)(,)d dGOTF r sPSF u vrusvu vcP x y P xx yy x y 2(,)(,)expj()d dASF u vCP x yuxvyx yR2022-11-1074/xyfxRfyRyxxyG光瞳位移光瞳光瞳位移的重叠区OOxy2022-11-1075(,)d d=xyGGOTF ffcx yS2022-11-10762sin2()xOTF fcDf
11、Rx2022-11-10772022-11-10782022-11-10792022-11-10802022-11-1081)(2cos)()(0rPTFrurMTFIIuia2022-11-1082)()(2cos)()(d)()()(1110111rPTFrPTFrurMTFrMTFIIuuuiusuia)(),(1rPTFrMTF2022-11-1083)()()()(1rOPTrSrOrI)(1rI2022-11-1084 ururruIuo)(52cos51)(32cos312cos41)(0 )5()(52cos)5(451)3()(32cos)3(431)(2cos)(41)(0
12、rPTFurrMTFrPTFurrMTFrPTFrurMTFIui2022-11-1085 光学传递函数测试技术2.光学传递函数测试原理及方法 )5()(52cos)5(451)3()(32cos)3(431)(2cos)(41)(0rPTFtrrMTFrPTFtrrMTFrPTFt rrMTFItitttVtu rVrt2022-11-1086)(2cos)(4)(0rPTFt rrMTFItit2022-11-10872022-11-1088cos0rr 2022-11-10892022-11-10902022-11-10912022-11-10922022-11-1094yxsyrxWy
13、xWiCsxOTFGdd),(),(2exp),(2022-11-10952022-11-1096 轴外点理论分辨率与轴 上点理论分辨率的关系MtCPPMCOuPPuf f uMCsin61.0cosDPPDcos/ff22coscos1sin61.0261.0sin61.0ufDu3coscost33coscos11NNtt2022-11-1097cos/ffcoscos1sin61.0uscoscos11NNss2022-11-1098250eqfmm121212112111eqnfxlnlllnlnl2211eqeeeqfDnnfxeqeeqeqeeqeqeeqefNAnfNAfnfufnfDnx22sin222212022-11-10996881222RDRD2022-11-10100nURUR6sin2sin22122nRRU6)(2sin122222)(62sin62NAnUnx
